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当前位置: 首页 > 公司产品 > 激光器和光源 >

准分子激光器

作者: Kevin Peng    发布于: 2015-03-24 15:31    点击:


EX5 EXCIMER LASER


2.5W of deep UV (193nm) in 1.2 cubic feet
Total system lifetime > 5 Billon pulses

Applications

  • Ionization source
  • Compact OEM systems
  • Micromachining
  • Refractive Surgery

A genuine full function, low cost MINI excimer laser in an ultra compact 48 X 26 X 26cm, 15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to 500Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and a total metal/ceramic laser chamber.

NEW TYPE II SUPERCHAMBER

The EX5 is now available in 250Hz, 500Hz and 1000Hz versions. The TYPE III SUPERCHAMBER produces higher average power output with longer gas lifetime. F2 operation in the VUV is also standard with up to 1W output power.

A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas. A 500Hz Industrial version is also available.

Key Benefits

  • Long sytem lifetime for Industrial installations
  • The most powerful mini excimer available anywhere
  • Mini excimer in a single package
  • Internal vacuum pump and halogen filter
  • Computer controlled
  • Ultra Low trigger jitter
  • High reliability state of the art, long life laser chamber
  • Excellent pulse to pulse stability
  • Very long shelf life
  • 250Hz, 500Hz and a NEW 1000Hz version
  • The latest in materials science TYPE III SUPERCHAMBER
  • High duty cycle Industrial version
  • 25mJ TEM00 C02 TEA Version

Specifications

 

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5/3* 12 20 8 6
Peak Power MW 0.25 1.75 2.5 1.0 0.75
Average Power @ 250Hz 0.3/0.4 2.5 4.0 1.4 1.3
Average Power @ 500Hz 0.5/1.0 5.0 8.0 2.5 2.4
Average Power 1000HZ 1.5 10 15 5.0 4
Dynamic gas lifetime Pulses to 50% energy 10E6 12E6 18E6 20E6 15E6
Shelf life to 50% energy 10 days 20 days 30 days >2 Months 30 Days
Pulse Length nS 8
Stability <2% Standard Deviation
Tube Service >5 Billion Pulses
Beam Size, mm 3X 6
Divergence, mRad full angle 1 X 2
Cooling Air standard/Optinal Water
Timing Jitter 2nS Standard Deviation
Weight 15kg 250/500Hz, 25kg 1000Hz

EX10 EXCIMER LASER

For applications requiring high repetition rate and moderate average power, when you need a compact air cooled laser, the EX10 is the choice.

The EX10 excimer laser offers state of the art performance in a compact package and provides a highly reliable, powerful source of ultraviolet radiation. Repetition rates of 300Hz and 600Hz in air cooled units, an average power of 12W with KrF at 248nm and 6.5W with ArF at 193nm give of operation between refills using XeCl.

Ideal for applications in micromachining, tunable laser pumping, marking and mass spectrometry. A 1000Hz water cooled version is also available.

Turn Key Table Top System

The EX10 laser is total metal/ceramic device and uses an advanced linear design to produce high energy output in a compact package. The carefully chosen materials for laser construction give the EX10 static and dynamic gas lifetimes unmatched by any other excimer laser. The gas lifetime advantage is particularly noticeable with F2 at 157nm in the VUV where static gas lifetime is over 15 days compared to 1 day for most excimer lasers. A optimized F2 version the EX10F is recommended for dedicated 157nm operation.

The EX10 is designed for medical, scientific and industrial applications where long term service free operation is required. Software automatically maintains constant , highly stable (<2%), energy output using the standard internal energy monitor. The software also warns the user if maintenance is required. The laser can operate directly from a PC for remote programming and software upgrading. The EX10 of course includes standard features such as active thermal stabilization, constant power and energy control, external triggered operation, sync out, automatic refill and automatic gas control. The laser can be completely controlled from a Windows 9x or Windows NT software package.

High Efficiency Discharge

High efficiency is the key to outstanding laser performance. The EX10 operates with up to 3 times the efficiency of similar mini excimer lasers. This means that only 1/3 of the energy input is required to achieve the same optical output. The optimized soft corona preionization state creates a uniform high efficiency discharge at repetition rates up to 1000Hz with a switching jitter of less than 2nS standard deviation. Additionally the increased efficiency greatly decreases the wasted energy deposited to the discharge and results in reduced EMI and much reduced electrode and component wear. This also increases total system lifetime and allows air cooled operation at the highest repetition rates.

Key Benefits

  • Easy to use all in one compact package
  • Internal vacuum pump and Halogen filter
  • Computer controlled
  • High pulse to pulse stability
  • Ultra long gas lifetime
  • The latest total metal/ceramic technology
  • High stability corona preionization
  • 1 Billion pulse optics service
  • 50mJ/100Hz TEA CO2 Version

Specifications

 

PARAMETER

 

ArF

 

KrF

 

XeCl

 

XeF

 

Wavelength nm

 

193

 

248

 

308

 

351

 

Energy Max. mJ

 

20

 

35

 

15

 

10

 

Energy Control Range mJ

 

5-20

 

10-35

 

7-15

 

4-10

 

Max. Stabilized Energy 200Hz

 

15

 

30

 

12

 

8

 

Average power Max. W 300/600

 

4/7

 

6/12

 

3.5/7

 

2/4

 

Average Power 750 Hz Water cooled

 

9

 

18

 

9

 

6

 

Repetition Rate Hz

 

300/600/750

 
 

Dynamic gas lifetime to 50% energy

 

20E6

 

35E6

 

20E6

 

20E6

 

Static Gas Life to 50% energy

 

60 days

 

90 days

 

>6 months

 

90 days

 

Pulse Length, ns

 

11-15

 

Beam Size , mm

 

8 X 3-4

 

Divergence, mRad full angle

 

1 X 2

 

Stability

 

<2% Standard Deviation

Optics Service
 

300E6

 

1000E6

 

100E6

 

300E6

Timing Jitter
 

2nS Standard Deviation

Tube Service
 

2-3 Billion Pulses

Cooling Air/water

The EX50/1000 35W KrF Laser

For applications requiring high repetition rate and moderate average power, when you need a compact air or water cooled laser, the EX50 is the choice.

The EX50 excimer laser offers state of the art performance in a compact package. The EX50 provides a highly reliable powerful source of ultraviolet radiation. Four models with repetition rates up to 250Hz, 500Hz and 750Hz are available with average powers to 35W with KrF at 248nm and 18W with ArF at 193nm. Long gas lifetime gives up to 1 year of operation between refills with XeCl. For applications in precision micromachining, tunable laser pumping, marking and semiconductor processing.

The EX50 laser is a total metal/ceramic device of advanced design. The carefully selected materials used in the laser construction give the EX50 static and dynamic gas lifetimes unmatched by any other excimer laser.

Applications

  • Pulsed laser deposition
  • Ionization
  • Micromachining

Key Benefits

  • Up to 750Hz repetition rate
  • Internal vacuum pumps and Halogen filter
  • High Power in a compact package
  • High reliability long life laser chamber
  • Excellent pulse to pulse stability
  • 1 Billion pulse optics service
  • Soft Corona preionization

Specifications

 

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 2.5 35 50 22 20
Average Power @250Hz .5 5 10 5 5
Average Power @500Hz 1 10 20 10 9
Repetition Rate 250/500/750
Dynamic gas lifetime Pulses to 50% energy 15E6 25E6 35E6 30E6 30E6
Shelf life Approx. to 50% energy 15 days 90 days 120 days >1 Year 120 Days
Pulse Length 10 17-20 nS
Beam Size 9 X 4 mm
Stability <2% Standard Deviation
Tube Service 3 Billion Pulses
Divergence   .8 X 1.6 mRad full angle
Cooling Air/Water
Window Service 300E6 500E6 >1 billion 200E6 300E6


The EX50LN Excimer Lasers

Applications
  • Spectroscopy
  • Semiconductor metrology
  • Optical tetsing
Key Benefits
  • Narrow linewidth in a single table top package
  • High spectral intensity
  • Tunable deep UV source
  • Optional Ultra Narrow, 0.5pm, 0.3pm and 0.08pm Linewidth
  • Available Oscillator Amplified line narrowed system

Narrowband lasers use intra cavity wavelength dispersive elements to line narrow the free running spectral range of excimer lasers. Linewidths of less than 1pm are routinely obtained in table top systems.
A free running excimer laser with a stable resonator produces a spectral output with a relatively wide bandwidth. For example free running ArF has a bandwidth of approximately 500pm FWHM. The spectral output can be greatly narrowed by inserting wavelength dispersive optical elements into the laser cavity . The narrow band output can also be tuned over a region which is typically close to the free running bandwidth of the laser. With both ArF and KrF linewidths of less than 1pm can be obtained. Narrow band excimer lasers exhibit exceptional coherence properties. For FBG BraggMaster lasers applications, which produce high spatial and high temporal coherence are recommended.

The EX50LN is available in a number of repetition rate models from 125Hz up to 1000Hz with up to 8mJ of narrow band energy at 248nm and 3mJ at 193nm. Higher energy output is available from an oscillator amplifier line narrowed system which produces up to 100mJ of highly line narrowed 248nm output.
Specificaion
 
PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm line center 157 193.3 248.35 308-311 351, 533
Energy Max. Broadband mJ 4 15 25 15 10
Energy Max. <1pm FWHM mJ 1 Line 3 5 3  
Tuning Range pm   500 400 N/A  
Average Power 125Hz   0.30 0.75 0.30  
Average Power @250Hz   0.60 1.0 0.50  
Average Power @500Hz   1.0 2.0 1.5  
Average Power @1000Hz W Call 2.0 5.0 2.0  
Dynamic gas lifetime Pulses to 50% energy* 15E6 28E6 25E6 30E6 20E6
Shelf life Approx. to 50% energy 15 days 60 days 90 days 1 Year 90 Days
Pulse Length, ns 14-18
Beam Size, mm 9 X 4
Divergence, mRad full angle 0.8 X 1.6
Tube Service 3 Billion Pulses
Window Service 200E6 150E6 500E6    
Cooling Air/Water


EX100 EXCIMER LASER

The EX100 excimer lasers are designed to provide high power industrial laser performance in a low cost, high reliability system. The unique linear design of GAM LASER products allows power scaling to be achieved at low incremental cost. The EX100 provides the first cost effective high power excimer laser.

The EX100 gives repetition rates to 750Hz with all excimer gases and F2 at 157nm, lower repetition rate versions are also available. The laser gives up to 68W output power with KrF and 32W with ArF.

Exceptional dynamic and static gas lifetime is obtained from the total metal/ceramic design and corona preionization system with over 30 million pulses to 50% energy on KrF and 12 weeks static gas lifetime. An industrial version gives longer gas lifetime. The laser is a total metal/ceramic device and uses the most advanced design of any commercial excimer laser.

Application

  • Pulsed laser deposition
  • Ionization
  • Micromachining

Key Benefits

  • A powerful high repetition rate system in a compact package
  • Low divergence output
  • Excellent pulse to pulse stability

 

SPECIFICATIONS

 

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 10 75 125 65 60
Average Power 60Hz 0.5 4 6 3 3
Average Power @125Hz 1.0 8 12 6 6
Average Power @250Hz 2.0 16 24 13 10
Dynamic gas lifetime Pulses to 50% energy 10E6 15E6 20E6 20E6 20E6
Shelf life Approx. to 50% energy 15 days 60 days 90 days >6 Months 90 Days
Pulse Length, ns 15-22
Beam Size, mm 10 X 5
Stability <2% Standard Deviation
Tube Service 2 Billion Pulses
Divergence, mRad full angle 0.8 X 1.5
Cooling Air/Water


EX350 EXCIMER LASER

The EX350 is a high energy excimer laser producing up to 250mJ output energy at 248nm and 150mJ at 193nm. The laser is designed for applications requiring high pulse energy such as Pulsed Laser Deposition.

Key Benefits

  • Available in 20Hz and 50Hz versions
  • High Energy in a single table top package
  • Low divergence beam
  • Computer controlled scientific instrument
  • Low Jitter <2nS standard deviation

Specifications

 

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 20 120 250 125 100
Average Power 20Hz version 0.4 2.0 5 2.5 2
Average Power 50Hz version 0.9 5 12 5 4
Shelf life Approx. to 50% energy 10 days 20 days 30 days 6 months 30 Days
Pulse Length
 

20-26 nS

Beam Size
 

19 X 7 mm

Divergence
 

3.0 X 1.2 mRad

Stability
 

<2% Standard Deviation

Timing Jitter
 

+/- 2ns


SE-Version 紫外激光器


Lasers for Semiconductor Applications (SE-Version)THE ULTIMATE IN EXCIMER LASER TECHNOLOGY
Semiconductor processing, mask inspection, microlithography and metrology lasers are available which meet CE mark and SEMI S2 standards. All semiconductor excimer lasers use the latest total metal/ceramic technology for maximum laser lifetime with minimal service. SE-version excimer lasers feature clean room packaging, longer chamber lifetimes and longer gas lifetimes than standard excimer lasers.
SE-Version Features

 
bullet 10 Billion pulse system lifetime
bullet Guaranteed <1% stability
bullet 200 Million pulses on a single ArF 193nm gas fill
bullet Hard anodize clean room package
bullet Meets SEMI S2 standards
 
The EX10SE Semiconductor Excimer Laser
SE Versions are available for EX10, EX50, EX100 and EX100H products.
EX10SE specifications
 
 
 
PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 3 20 35 15 15
Energy Control Range mJ 1-3 5-20 10-35 7-15 7-15
Max. Stabilized Energy 200Hz 2.5 15 30 15 12
Average power Max. W 300/600 0.6/1.2 4/7 6/12 3/6 3/6
Stability standard deviation < 1% at max. repetition rate
Repetition Rate, Hz 300/600/1000
Dynamic gas lifetime 200E6 200E6 500E6 100E6 300E6
Static Gas Life to 50% energy 15 days 60 days 90 days >1 Year 90 days
Pulse Length, ns 12-15
Beam Size, mm 5X 3 8 X 3
Divergence, mRad full angle 1 X 2
Cooling Air
Optics Service 500E6 300E6 1000E6 100E6 300E6


INDUSTRIAL LASER PRODUCTS (IN Versions)

Total Metal/Ceramic SUPERCHAMBER II Industrial lasers feature additional technology to improve gas, optics and system lifetimes.

Industrial laser products are specially designed for 24/7 operation at high duty cycle or continuous operation at maximum repetition rate. The lasers utilize high performance components and improved discharge technology to increase gas and system lifetime. Industrial versions are available for the model EX5, EX10 and the EX50 lasers. Industrial lasers have additional gas conditioning and lifetime enhancing components to give maximum reliability.

Industrial versions provide reliable long term operation with a minimum of service. The lasers can operate continuously for hundreds to thousand s of hours without maintenance depending upon repetition rate.

Applications include semiconductor inspection, marking, micromachining, FBG fabrication and OEM systems.

  • Highly reliable high duty cycle/continuous use
  • Over 1 billion pulses hands free operation
  • Long life laser chamber, up to 4 billion pulses
  • High stability output <2% standard deviation
  • Internal energy detector

 

EX5IN SPECIFICATIONS

 

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5 12 20 7 5
Average Power @250Hz 0.5 2.4 4 5 5
Average Power @500Hz 1 4 8 9 9
Average Power @750Hz 1.5 5 10 12 12
Repetition Rate, Hz 250/500
Dynamic gas lifetime to 50% energy

10E6

20E6

35E6

20E6 20E6
Shelf life Approx. to 50% energy 15 days 90 days 120 days >6 months 120 Days
Pulse Length, ns 8
Beam Size, mm 3 X 6
Stability <2% Standard Deviation
Tube Service 2 Billion Pulses
Divergence, mRad full angle 1 X 2
Cooling Air/Water
Window Service 1000E6 1000E6 1000E6 200E6 300E6

 

EX10IN SPECIFICATIONS

 

PARAMETER

ArF

KrF

XeCl

XeF

Wavelength nm

193

248

308

351

Energy Max. mJ

20

30

12

12

Energy Control Range, mJ

5-20

10-30

7-12

7-12

Average power EX10IN/300

4.0

6.0

3.0

3.0

Average power EX10IN/600

7.0

12.0

6.0

6.0

Average Power EX10IN/750

9.0

18.0

8.0

8.0

Repetition Rate Hz

300/600/750

Dynamic gas lifetime

20E6

35E6

20E6

20E6

Static Gas Life to 50% energy

60 days

90 days

6 months

90 days

Pulse Length,ns

15

Beam Size, mm

8 X 3-4

Divergence, mRad full angle

2 x 1

Stability <2% Standard deviation

Cooling

Air

Optics Service 300-500 Million 1 Billion 100E6 500E6
Tube Service > 3 Billion Pulses

 

EX50IN SPECIFICATIONS

 

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 2.5 35 50 20 20
Average Power @250Hz 0.5 5 10 5 5
Average Power @500Hz 1 10 20 9 9
Average Power @750Hz 1.5 15 28 12 12
Repetition Rate, Hz 250/500/750
Dynamic gas lifetime to 50% energy

10E6

20E6

30E6

15E6

150E6

Shelf life Approx. to 50% energy 15 days 90 days 120 days 180 days 120 Days
Pulse Length, ns 10 15-20
Beam Size, mm 9 X 4
Stability <2% Standard Deviation
Tube Service 3 Billion Pulses
Divergence, mRad full angle 2 X 1
Cooling Air/Water
Window Service 500E6 500E6 >1 billion 200E6 300E6
 

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