Si base chip
A(membrane size) = 50 ~ 500 μm
B(membrane thickness) = 10 ~ 100 nm
C(chip size) = 5mm, 10 mm
Advantage
- Conventional solid-state nanopore device
- Easy fabrication and application
- Low price per chip
Wet transfer low-noise chip
(Quartz base chip)
A(membrane size) = 2 μm, 300 nm
B(membrane thickness) = 10 ~ 100 nm
C(chip size) = 5mm, 10 mm
Advantage
- Low noise and RC delay device
- 2D membrane
Disadvantage
- Impossible to cleaning by SPM